Metallization of fluorocarbon-based dielectric for interconnects

ABSTRACT

Embodiments of the present disclosure are directed towards metallization of a fluorocarbon-based dielectric material for interconnect applications. In one embodiment, an apparatus includes a semiconductor substrate, a device layer disposed on the semiconductor substrate, the device layer including one or more transistor devices, and an interconnect layer disposed on the device layer, the interconnect layer comprising a fluorocarbon-based dielectric material, where x represents a stoichiometric quantity of fluorine relative to carbon in the dielectric material, and one or more interconnect structures configured to route electrical signals to or from the one or more transistor devices, the one or more interconnect structures comprising cobalt (Co), or ruthenium (Ru), or combinations thereof. Other embodiments may be described and/or claimed.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a divisional of U.S. patent application Ser. No.13/560,936, filed Jul. 27, 2012 and titled “METALLIZATION OFFLUOROCARBON-BASED DIELECTRIC FOR INTERCONNECTS,” the entirety of whichis incorporated herein by reference.

FIELD

Embodiments of the present disclosure generally relate to the field ofintegrated circuits, and more particularly, to metallization of afluorocarbon-based dielectric material for interconnect applications.

BACKGROUND

An integrated circuit (IC) device may include an interlayer dielectric(ILD) stack having interconnect structures formed in a dielectricmaterial to route electrical signals of the IC device. Careful selectionof materials used for the dielectric materials and interconnects of anILD stack may facilitate formation and function of an IC device thatincludes such an ILD stack.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments will be readily understood by the following detaileddescription in conjunction with the accompanying drawings. To facilitatethis description, like reference numerals designate like structuralelements. Embodiments are illustrated by way of example and not by wayof limitation in the figures of the accompanying drawings.

FIG. 1 schematically illustrates a top view of an integrated circuit(IC) device in die form and wafer form, in accordance with someembodiments.

FIG. 2 schematically illustrates a cross-section side view of an ICdevice, in accordance with some embodiments.

FIG. 3 schematically illustrates an example cross-section side view ofinterconnect layers of an IC device, in accordance with someembodiments.

FIG. 4 schematically illustrates another example cross-section side viewof interconnect layers of an IC device, in accordance with someembodiments.

FIG. 5 schematically illustrates an interconnect structure having abarrier liner, in accordance with some embodiments.

FIG. 6 schematically illustrates another interconnect structure having abarrier liner, in accordance with some embodiments.

FIG. 7 is a flow diagram for a method of fabricating and packaging an ICdevice, in accordance with some embodiments.

FIG. 8 schematically illustrates a computing device in accordance withone implementation of the invention.

DETAILED DESCRIPTION

Fluorocarbon-based dielectric materials are emerging as a class ofdielectric materials that may have a lower polarizability than otherdielectric materials used for ILD applications such as, for example,carbon-doped oxide (CDO) dielectric materials. The lower polarizabilitymay allow the fluorocarbon-based dielectric material to provide a lowerdielectric constant (k) at a given porosity relative to the otherdielectric materials.

However, a current challenge with fluorocarbon-based dielectricmaterials is that fluorine-based compounds such as, for example,fluorocarbons (CF_(n)) and hydrogen fluoride (HF) may outgas duringelevated temperatures associated with backend thermal processing. Theemitted fluorine-based compounds may be highly reactive and formvolatile compounds with current interconnect materials that may lead tofailure of an interlayer dielectric (ILD) stack. For example, tantalumnitride (TaN) in the presence of the fluorine-based compounds may formthe volatile compound tantalum fluoride (TaF), which may melt and/orboil at backend processing temperatures.

Embodiments of the present disclosure describe metallization of afluorocarbon-based dielectric material for interconnect applications. Inthe following description, various aspects of the illustrativeimplementations will be described using terms commonly employed by thoseskilled in the art to convey the substance of their work to othersskilled in the art. However, it will be apparent to those skilled in theart that the present invention may be practiced with only some of thedescribed aspects. For purposes of explanation, specific numbers,materials and configurations are set forth in order to provide athorough understanding of the illustrative implementations. However, itwill be apparent to one skilled in the art that the present inventionmay be practiced without the specific details. In other instances,well-known features are omitted or simplified in order not to obscurethe illustrative implementations.

In the following detailed description, reference is made to theaccompanying drawings which form a part hereof, wherein like numeralsdesignate like parts throughout, and in which is shown by way ofillustration embodiments in which the subject matter of the presentdisclosure may be practiced. It is to be understood that otherembodiments may be utilized and structural or logical changes may bemade without departing from the scope of the present disclosure.Therefore, the following detailed description is not to be taken in alimiting sense, and the scope of embodiments is defined by the appendedclaims and their equivalents.

Various operations are described as multiple discrete operations inturn, in a manner that is most helpful in understanding the claimedsubject matter. However, the order of description should not beconstrued as to imply that these operations are necessarily orderdependent.

For the purposes of the present disclosure, the phrase “A and/or B”means (A), (B), or (A and B). For the purposes of the presentdisclosure, the phrase “A, B, and/or C” means (A), (B), (C), (A and B),(A and C), (B and C), or (A, B and C).

The description may use perspective-based descriptions such astop/bottom, in/out, over/under, and the like. Such descriptions aremerely used to facilitate the discussion and are not intended torestrict the application of embodiments described herein to anyparticular orientation.

The description may use the phrases “in an embodiment,” or “inembodiments,” which may each refer to one or more of the same ordifferent embodiments. Furthermore, the terms “comprising,” “including,”“having,” and the like, as used with respect to embodiments of thepresent disclosure, are synonymous.

The term “coupled with,” along with its derivatives, may be used herein.“Coupled” may mean one or more of the following. “Coupled” may mean thattwo or more elements are in direct physical or electrical contact.However, “coupled” may also mean that two or more elements indirectlycontact each other, but yet still cooperate or interact with each other,and may mean that one or more other elements are coupled or connectedbetween the elements that are said to be coupled with each other. Theterm “directly coupled” may mean that two or elements are in directcontact.

In various embodiments, the phrase “a first layer formed, deposited, orotherwise disposed on a second layer,” may mean that the first layer isformed, deposited, or disposed over the second layer, and at least apart of the first layer may be in direct contact (e.g., direct physicaland/or electrical contact) or indirect contact (e.g., having one or moreother layers between the first layer and the second layer) with at leasta part of the second layer.

As used herein, the term “module” may refer to, be part of, or includean Application Specific Integrated Circuit (ASIC), an electroniccircuit, a processor (shared, dedicated, or group) and/or memory(shared, dedicated, or group) that execute one or more software orfirmware programs, a combinational logic circuit, and/or other suitablecomponents that provide the described functionality.

FIG. 1 schematically illustrates a top view of an IC device 100 in dieform and wafer form, in accordance with some embodiments. In someembodiments, the IC device 100 may be one of a plurality of IC devicesformed on a wafer 10 composed of semiconductor material. The wafer 10may include one or more dies (hereinafter “dies 101”) formed on asurface of the wafer 10. Each of the dies 101 may be a repeating unit ofa semiconductor product that includes the IC device 100. After afabrication process of the semiconductor product is complete, the wafer10 may undergo a singulation process in which each of the dies 101 isseparated from one another to provide discrete “chips” of thesemiconductor product. The wafer 10 may include a variety of sizes. Insome embodiments, the wafer 10 has a diameter ranging from about 25.4 mmto about 450 mm. The wafer 10 may include other sizes and/or othershapes in other embodiments.

According to various embodiments, the IC device 100 may be in wafer 10form (e.g., not singulated) or die form (e.g., singulated). In someembodiments, the IC device 100 may correspond with or be part of a dieof the dies 101. In FIG. 1, one of the dies 101 (shaded in wafer 10)including the IC device 100 is depicted in an exploded view. The ICdevice 100 may include one or more transistors (e.g., transistor(s) 140of FIG. 2) and/or supporting circuitry to route electrical signals tothe one or more transistors.

In some embodiments, the IC device 100 can include memory and/or logicdevices combined on a single die. For example, a memory device may beformed on a same die 101 as a processor (e.g., processor 1004 of FIG. 8)or other logic that is configured to store information in the memorydevice or execute instructions of the memory device. For example, the ICdevice 100 may include a processor and cache formed on the same die insome embodiments. Techniques and configurations described herein may beincorporated in logic or memory, or combinations thereof.

FIG. 2 schematically illustrates a cross-section side view of an ICdevice 200, in accordance with some embodiments. According to variousembodiments, the IC device 200 is formed on a substrate 102 (e.g., wafer10 of FIG. 1). The substrate 102 may be a semiconductor substratecomposed of semiconductor material systems including, for example,N-type or P-type materials systems. The substrate 102 may include, forexample, a crystalline substrate formed using a bulk silicon or asilicon-on-insulator substructure. In some embodiments, thesemiconductor substrate 102 may be formed using alternate materials,which may or may not be combined with silicon, that include but are notlimited to germanium, indium antimonide, lead telluride, indiumarsenide, indium phosphide, gallium arsenide, or gallium antimonide.Further materials classified as group II-VI, III-V or group IV materialsmay also be used to form the substrate 102. Although a few examples ofmaterials from which the substrate 102 may be formed are described here,any material that may serve as a foundation upon which an IC device 200may be used in accordance with various embodiments. In some embodiments,the substrate 102 is part of a singulated die (e.g., dies 101 of FIG. 1)of a wafer (e.g., wafer 10 of FIG. 1).

In some embodiments, the IC device 200 includes one or more devicelayers (hereinafter “device layer 104”) disposed on the substrate 102.The device layer 104 may include features of one or more transistors(hereinafter “transistor(s) 140”) formed on the substrate 102. Thedevice layer 104 may include, for example, one or more source and/ordrain regions (hereinafter “S/D regions”) 120, a gate 122 to controlcurrent flow in the transistor(s) 140 between the S/D regions 120, andone or more source and/or drain contacts (hereinafter “S/D contacts124”) to route electrical signals to/from the S/D regions 120.

The transistor(s) 140 may include additional features not depicted forthe sake of clarity such as device isolation regions, gate contacts, andthe like. The transistor(s) 140 are not limited to the type andconfiguration depicted in FIG. 2 and may include a wide variety of othertypes and configurations such as, for example, planar and non-planartransistors such as dual- or double-gate transistors, tri-gatetransistors, and all-around gate (AAG) or wrap-around gate transistors,some of which may be referred to as FinFETs (Field Effect Transistors).In some embodiments, the device layer 104 includes one or moretransistors or memory cells of a logic device or a memory device, orcombinations thereof.

Electrical signals such as, for example, power and/or input/output (I/O)signals may be routed to and/or from the transistor(s) 140 of the devicelayer 104 through one or more interconnect layers (e.g., hereinafter“interconnect layers 106-118”) disposed on the device layer 104. Forexample, electrically conductive features of the device layer 104 suchas, for example, the gate 122 and S/D contacts 124 may be electricallycoupled with interconnect structures 128 of the interconnect layers106-118. The one or more interconnect layers 106-118 may form aninterlayer dielectric (ILD) stack 119 of the IC device 200.

The interconnect structures 128 may be configured within theinterconnect layers 106-118 to route electrical signals according to awide variety of designs and is not limited to the particularconfiguration of interconnect structures 128 depicted in the figures.Although a particular number of interconnect layers 106-118 is depictedfor the configuration in FIG. 2, embodiments of the present disclosureinclude IC devices having more or fewer interconnect layers 106-118 thandepicted.

In some embodiments, the interconnect structures 128 may include trenchstructures 128 a (sometimes referred to as “lines”) and/or viastructures 128 b (sometimes referred to as “holes”) filled with anelectrically conductive material such as a metal. In some embodiments,the interconnect structures 128 may comprise cobalt (Co), or ruthenium(Ru), or combinations thereof. The interconnect structures 128 maycomport with embodiments described in connection with interconnectstructures 328 of FIG. 3, interconnect structures 428 of FIG. 4,interconnect structure 528 of FIG. 5, interconnect structure 628 of FIG.6, or combinations thereof.

In some embodiments, the trench structures 128 a may be configured toroute electrical signals in a direction of a plane that is substantiallyparallel with a surface of the substrate 102 upon which the device layer104 is formed. For example, the trench structures 128 a may routeelectrical signals in a direction in and out of the page in theperspective of FIG. 2, in some embodiments. The via structures 128 b maybe configured to route electrical signals in a direction of a plane thatis substantially perpendicular with the surface of the substrate 102upon which the device layer 104 is formed. In some embodiments, the viastructures 128 b may electrically couple trench structures 128 a ofdifferent interconnect layers 106-118 together.

The interconnect layers 106-118 may include a dielectric material 126disposed between the interconnect structures 128, as can be seen. Insome embodiments, the dielectric material 126 may include afluorocarbon-based dielectric material (e.g., CF_(x)). According tovarious embodiments, the fluorocarbon-based dielectric material may havea compositional range from 40% to 60% fluorine (F) and 40% to 60% carbon(C). The fluorocarbon-based dielectric material may have otherstoichiometric ratios in other embodiments.

According to various embodiments, a first interconnect layer 106(referred to as Metal 1 or “M1”) may be formed directly on the devicelayer 104. In some embodiments, the first interconnect layer 106 mayinclude trench structures 128 a, as can be seen. The trench structures128 a of the first interconnect layer 106 may be coupled with contacts(e.g., S/D contacts 124) of the device layer 104.

A second interconnect layer 108 (referred to as Metal 2 or “M2”) may beformed directly on the first interconnect layer 106. In someembodiments, the second interconnect layer 108 may include viastructures 128 b to couple trench structures 128 a of the secondinterconnect layer 108 with trench structures 128 a of the firstinterconnect layer 106. Although the trench structures 128 a and the viastructures 128 b are structurally delineated with a line within eachinterconnect layer (e.g., within the second interconnect layer 108) forthe sake of clarity, the trench structures 128 a and the via structures128 b may be structurally and/or materially contiguous (e.g.,simultaneously filled during a dual-damascene process) in someembodiments.

A third interconnect layer 110 (referred to as Metal 3 or “M3”), fourthinterconnect layer 112 (referred to as Metal 4 or “M4”), fifthinterconnect layer 114 (referred to as Metal 5 or “M5”), sixthinterconnect layer 116 (referred to as Metal 6 or “M6”), and seventhinterconnect layer 118 (referred to as Metal 7 or “M7”) may be formed insuccession on the second interconnect layer 108 according to similartechniques and configurations described in connection with the secondinterconnect layer 108 on the first interconnect layer 106.

In some embodiments, the dielectric material 126 used to form innerinterconnect layers (e.g., M1-M2, M1-M3, M1-M4) disposed adjacent to thedevice layer 104 may be composed of a fluorocarbon-based dielectricmaterial while outer interconnect layers disposed further away from thedevice layer 104 may be composed of another dielectric material such as,for example, carbon-doped silicon oxide (e.g., SiOC). The innerinterconnect layers may include, for example, M1 to M2, M1 to M3, or M1to M4. The outer interconnect layers may include, for example, M3 to M7,M4 to M7, or M5 to M7, where M7 represents an outermost interconnectlayer relative to the device layer 104. Inner interconnect layers mayhave a lower capacitance than the outer interconnect layers.

In some embodiments, features of the device layer 104 may comport withembodiments described herein. For example, contacts in the device layer104 such as, for example, S/D contacts 124 may include materialconfigurations described in connection with interconnect structures 328,428, 528, or 628 of respective FIGS. 3-6. The same principles may beapplied to gate contacts (not shown) of the device layer 104. In someembodiments, any one or more of the interconnect layers 106-118 mayinclude interconnect structures 128 that comport with embodimentsdescribed in connection with interconnect structures 328, 428, 528, or628 of respective FIGS. 3-6.

The IC device 200 may include a passivation layer 134 (e.g., polyimideor similar material) and one or more bond pads 136 formed on theinterconnect layers 106-118. The bond pads 136 may be electricallycoupled with the interconnect structures 128 and configured to route theelectrical signals of transistor(s) 140 to other external devices. Forexample, solder bonds may be formed on the one or more bond pads 136 tomechanically and/or electrically couple a chip including the IC device200 with another component such as a circuit board. The IC device 200may have other alternative configurations to route the electricalsignals from the interconnect layers 106-118 than depicted in otherembodiments. In other embodiments, the bond pads 136 may be replaced byor may further include other analogous features (e.g., posts) that routethe electrical signals to other external components.

FIG. 3 schematically illustrates an example cross-section side view ofinterconnect layers 106-110 of an IC device (e.g., IC device 200 of FIG.2), in accordance with some embodiments. The interconnect layers 106-110may include interconnect structures 328 such as, for example, trenchstructures 328 a and/or via structures 328 b, as can be seen.

In some embodiments, one or more of the interconnect layers 106-110 mayinclude interconnect structures 328 that are composed primarily of Co,or Ru, or combinations thereof. In some embodiments, the interconnectstructures 328 may be single-phase interconnects that are composed onlyof Co, or Ru, or combinations thereof.

Interconnect structures 328 that are primarily or solely composed of Co,or Ru, or combinations thereof may reduce fabrication costs of an ICdevice by allowing or facilitating the elimination of various processoperations and/or materials (e.g., fabrication of barrier liner). Insome embodiments, the interconnect structures 328 do not include abarrier liner. The material (e.g., the Co or Ru) of the interconnectstructures 328 may be in direct contact with the dielectric material126. The dielectric material 126 used in connection with theinterconnect structures 328 may include a fluorocarbon-based dielectricmaterial in some embodiments. The Co and/or Ru of the interconnectstructures 328 may resist formation of volatile compounds in thepresence of fluorine-based compounds that may outgas or otherwise beemitted from the dielectric material 126 during thermal processesassociated with fabrication of an IC device. In some embodiments, any ofone or more of the interconnect layers (e.g., interconnect layers106-118 of FIG. 2) of an IC device may include interconnect structures328 in accordance with embodiments described herein.

In some embodiments, an isolation film 332 may be disposed betweendielectric material 126 of adjacent interconnect layers (e.g.,interconnect layers 106, 108). The isolation film 332 may serve as ahermetic barrier between interconnect layers, as can be seen, to preventoxidation and/or other corrosion of the interconnect structures 328. Theisolation film 332 may be composed of another dielectric material thathas a chemical composition that is different than the dielectricmaterial 126. In some embodiments, the isolation film 332 may becomposed of silicon nitride (SiN) or silicon carbide (SiC). Theisolation film 332 may be disposed between the dielectric material 126of an interconnect layer (e.g., interconnect layer 108) and the devicelayer (e.g., device layer 104 of FIG. 2) in some embodiments.

FIG. 4 schematically illustrates another example cross-section side viewof interconnect layers 106-110 of an IC device (e.g., IC device 200 ofFIG. 2), in accordance with some embodiments. The interconnect layers106-108 may include interconnect structures 328 such as, for example,trench structures 328 a and/or via structures 328 b, as can be seen. Theinterconnect layer 110 may include interconnect structures 428 such as,for example, trench structures 428 a and/or via structures 428 b, as canbe seen. The interconnect structures 428 are not limited to theparticular configuration depicted in FIG. 4. Furthermore, other suitablecombinations of the interconnect structures 328 and 428 than depictedmay be used in other embodiments.

In some embodiments, one or more of the interconnect layers (e.g.,interconnect layer 110 in FIG. 4) may include interconnect structures428 that include a bulk portion 429 and a barrier liner 430. In someembodiments, the bulk portion 429 (e.g., a majority of the interconnectstructure) is composed of copper (Cu) and the barrier liner 430 includesCo, or Ru, or combinations thereof. The interconnect structures 428 maycomport with embodiments described in connection with interconnectstructures 528 and 628 of respective FIGS. 5-6 in some embodiments.

The dielectric material 126 used in connection with the interconnectstructures 428 may include a fluorocarbon-based dielectric material insome embodiments. The Co and/or Ru of the interconnect structures 428may resist formation of volatile compounds in the presence offluorine-based compounds that may outgas or otherwise be emitted fromthe dielectric material 126 during thermal processes associated withfabrication of an IC device. In some embodiments, any of one or more ofthe interconnect layers (e.g., interconnect layers 106-118 of FIG. 2) ofan IC device may include interconnect structures 428 in accordance withembodiments described herein.

In some embodiments, an isolation film 332 may be disposed betweendielectric material 126 of adjacent interconnect layers (e.g.,interconnect layers 106, 108). The isolation film 332 may serve as ahermetic barrier between interconnect layers to prevent oxidation and/orother corrosion of the interconnect structures 428.

FIG. 5 schematically illustrates an interconnect structure 528 having abarrier liner 530, in accordance with some embodiments. The barrierliner 530 may be disposed between a bulk portion 429 (e.g., Cu) of theinterconnect structure 528 and dielectric material 126 (e.g., CF_(x)) ofan interconnect layer. The interconnect structure 528 may represent anyinterconnect structure of an IC device including, for example, trenchstructures (e.g., trench structures 128 a of FIG. 2) and/or viastructures (e.g., via structures 128 b of FIG. 2).

In some embodiments, the barrier liner 530 may be composed (e.g.,primarily or solely) of Co, or Ru, or combinations thereof. In otherembodiments, the barrier liner 530 may be composed of Co, or Ru, incombination with other materials such as, for example, titanium nitride(TiN). For example, in some embodiments, the barrier liner 530 mayinclude a film composed of TiN doped with Co, or Ru, or combinationsthereof. The barrier liner 530 may include a film of TiN having asidewall thickness ranging from 2 nanometers (nm) to 3 nm and a bottomthickness ranging from 5 nm to 10 nm or more. Films composed of Coand/or Ru may be conformal films deposited by CVD and having sidewalland bottom thickness that are substantially the same. The barrier liner530 may include additional films or have other thicknesses in someembodiments.

FIG. 6 schematically illustrates another interconnect structure 628having a barrier liner 630, in accordance with some embodiments. Thebarrier liner 630 may be disposed between a bulk portion 429 (e.g., Cu)of the interconnect structure 628 and dielectric material 126 (e.g.,CF_(x)) of an interconnect layer. The interconnect structure 628 mayrepresent any interconnect structure of an IC device including, forexample, trench structures (e.g., trench structures 128 a of FIG. 2)and/or via structures (e.g., via structures 128 b of FIG. 2).

In some embodiments, the barrier liner 630 may include a first film 630a coupled with the bulk portion 429 and a second film 630 b coupled withthe first film 630 a, as can be seen. The first film 630 a may becomposed (e.g., primarily or solely) of Co, or Ru, or combinationsthereof. The second film 630 b may be composed of TiN. In otherembodiments, the first film 630 a may be composed of TiN and the secondfilm 630 b may be composed of Co, or Ru, or combinations thereof. Insome embodiments, the TiN may serve as a nucleation layer for subsequentCo or Ru deposition. Cu may have a better adhesion to Co and Ru than toTiN. The use of Co or Ru alone may not prevent diffusion of Cu and theuse of TiN may provide a diffusion barrier in some embodiments.

FIG. 7 is a flow diagram for a method 700 of fabricating and packagingan IC device (e.g., IC device 200 of FIG. 2), in accordance with someembodiments. The method may comport with embodiments described inconnection with FIGS. 1-6.

At 702, the method 700 includes forming one or more device layers (e.g.,device layer 104 of FIG. 2) on a semiconductor substrate (e.g.,substrate 102 of FIG. 2). The one or more device layers may be formedusing semiconductor fabrication processes such as thin film depositionof various materials and patterning (e.g., etch and/or lithography) ofthe materials to form one or more transistors (e.g., transistor(s) 140of FIG. 2) of the IC device. The IC device may include, for example, alogic device, a memory device, or combinations thereof.

At 704, the method 700 may further include forming one or moreinterconnect layers (e.g., interconnect layers 106-118 of FIG. 2)including interconnect structures (e.g., interconnect structures 128 ofFIG. 2) on the one or more device layers. The one or more interconnectlayers may include a dielectric material (e.g., dielectric material 126of FIG. 2) and interconnect structures configured to route electricalsignals to or from the one or more transistor devices of the one or moredevice layers. In some embodiments, the dielectric material comprises afluorocarbon-based dielectric material (e.g., CF_(x)) and theinterconnect structures comprise Co, or Ru, or combinations thereof.

The one or more interconnect layers may be formed by depositing afluorocarbon-based dielectric material on the one or more device layers.The dielectric material may be deposited according to any suitableprocess including, fore example, plasma-enhanced chemical vapordeposition (PECVD) or a spin-on process.

The one or more interconnect layers may be further formed by selectivelyremoving portions of the dielectric material to form openings (e.g.,trench openings and/or via openings) in a dielectric layer that includesthe dielectric material. In some embodiments, the dielectric materialmay be selectively removed by a patterning process including etch and/orlithography processes.

The one or more interconnect layers may be further formed by depositingCo and/or Ru into the openings to form at least a portion of theinterconnect structures. In some embodiments, a dual-damascene processmay be used to simultaneously form the interconnect structures (e.g.,trench structures and via structures) of an individual interconnectlayer of the interconnect layers. In some embodiments, the Co and/or Rumay be deposited to substantially or completely fill the openings toprovide interconnect structures (e.g., interconnect structures 328) inaccordance with embodiments described in connection with FIG. 3. The Coand/or Ru may be in direct contact with the dielectric material.

In other embodiments, forming the interconnect layer may further includeforming a barrier liner (e.g., barrier liner 430 of FIG. 4) of the oneor more interconnect structures. The barrier liner may be formed bydepositing a barrier liner material onto surfaces of the dielectricmaterial in the openings. In some embodiments, the barrier linercomprises Co and/or Ru. In some embodiments, the barrier liner may besubstantially or entirely composed of Co and/or Ru. In some embodiments,the barrier liner may be formed by depositing a barrier liner materialsuch as, for example, TiN doped with Co and/or Ru. In other embodiments,the barrier liner may be formed by depositing a first film (e.g., firstfilm 630 a of FIG. 6) on the dielectric material and a second film(e.g., second film 630 b of FIG. 6) on the first film, the second filmhaving a different chemical composition than the first film. The firstfilm may include, for example, TiN or similar material and the secondfilm may include, for example, Co and/or Ru. The first film and/orsecond film may have other suitable material compositions in otherembodiments.

Forming the interconnect layer may further include forming a bulkportion of the one or more interconnect structures. The bulk portion maybe formed by depositing a bulk material (e.g., Cu) on the barrier linerusing any suitable deposition process including, for example, chemicalvapor deposition (CVD) and/or electroplating processes.

Forming the one or more interconnect layers may further includeperforming a chemical mechanical polishing (CMP) process on the one ormore interconnect structures and/or depositing an isolation film (e.g.,isolation film 332 of FIG. 3) on the dielectric layer and one or moreinterconnect structures. The CMP process may provide a planar surface byremoving excess interconnect structure material deposited into theopenings. The isolation film may be formed by depositing anotherdielectric material (e.g., SiN or SiC) that has a chemical compositionthat is different than the dielectric material (e.g., CF_(x)) on thedielectric material. The actions described in connection with formingthe one or more interconnect layers may be repeated to form additionalinterconnect layers and may begin with depositing the isolation film insome embodiments.

At 706, the method 700 may further include forming one or moredie-coupling features (e.g., bond pads 136 of FIG. 2) on the one or moreinterconnect layers, the one or more die-coupling features beingelectrically coupled with the interconnect structures. The one or moredie-coupling features may be formed by depositing and patterning anelectrically conductive material such as metal.

At 708, the method 700 may further include mounting the semiconductorsubstrate on a circuit board (e.g., motherboard 1002 of FIG. 8) or otherpackage substrate using the one or more die-coupling features. In someembodiments, the semiconductor substrate may be flip-chip mounted on thecircuit board or mounted using any suitable surface mount technology(SMT).

According to various embodiments, using metallization schemes asdescribed herein (e.g., using Co and/or Ru as an interconnect materialfor fluorocarbon-based dielectric material according to variousembodiments) may reduce, inhibit, or otherwise prevent the formation ofvolatile compounds during backend thermal processing of the IC devicethat may otherwise form with other metallization schemes (e.g.,tantalum).

Embodiments of the present disclosure may be implemented into a systemusing any suitable hardware and/or software to configure as desired.FIG. 8 schematically illustrates a computing device 1000 in accordancewith one implementation of the invention. The computing device 1000 mayhouse a board such as motherboard 1002. The motherboard 1002 may includea number of components, including but not limited to a processor 1004and at least one communication chip 1006. The processor 1004 may bephysically and electrically coupled to the motherboard 1002. In someimplementations, the at least one communication chip 1006 may also bephysically and electrically coupled to the motherboard 1002. In furtherimplementations, the communication chip 1006 may be part of theprocessor 1004.

Depending on its applications, computing device 1000 may include othercomponents that may or may not be physically and electrically coupled tothe motherboard 1002. These other components may include, but are notlimited to, volatile memory (e.g., DRAM), non-volatile memory (e.g.,ROM), flash memory, a graphics processor, a digital signal processor, acrypto processor, a chipset, an antenna, a display, a touchscreendisplay, a touchscreen controller, a battery, an audio codec, a videocodec, a power amplifier, a global positioning system (GPS) device, acompass, an accelerometer, a gyroscope, a speaker, a camera, and a massstorage device (such as hard disk drive, compact disk (CD), digitalversatile disk (DVD), and so forth).

The communication chip 1006 may enable wireless communications for thetransfer of data to and from the computing device 1000. The term“wireless” and its derivatives may be used to describe circuits,devices, systems, methods, techniques, communications channels, etc.,that may communicate data through the use of modulated electromagneticradiation through a non-solid medium. The term does not imply that theassociated devices do not contain any wires, although in someembodiments they might not. The communication chip 1006 may implementany of a number of wireless standards or protocols, including but notlimited to Wi-Fi (IEEE 802.11 family), WiMAX (IEEE 802.16 family), IEEE802.20, long term evolution (LTE), Ev-DO, HSPA+, HSDPA+, HSUPA+, EDGE,GSM, GPRS, CDMA, TDMA, DECT, Bluetooth, derivatives thereof, as well asany other wireless protocols that are designated as 3G, 4G, 5G, andbeyond. The computing device 1000 may include a plurality ofcommunication chips 1006. For instance, a first communication chip 1006may be dedicated to shorter range wireless communications such as Wi-Fiand Bluetooth and a second communication chip 1006 may be dedicated tolonger range wireless communications such as GPS, EDGE, GPRS, CDMA,WiMAX, LTE, Ev-DO, and others.

The processor 1004 of the computing device 1000 may include anintegrated circuit die packaged within the processor 1004. In someimplementations of the invention, the integrated circuit die (e.g., oneof dies 101 of FIG. 1) of the processor 1004 comprises an IC device(e.g., IC device 200 of FIG. 2), as described herein. The term“processor” may refer to any device or portion of a device thatprocesses electronic data from registers and/or memory to transform thatelectronic data into other electronic data that may be stored inregisters and/or memory.

The communication chip 1006 may also include an integrated circuit diepackaged within the communication chip 1006. In accordance with anotherimplementation of the invention, the integrated circuit die of thecommunication chip includes an IC device (e.g., IC device 200 of FIG.2), as described herein.

In further implementations, another component (e.g., memory device orother integrated circuit device) housed within the computing device 1000may contain an integrated circuit die that includes an IC device (e.g.,IC device 200 of FIG. 2), as described herein.

In various implementations, the computing device 1000 may be a laptop, anetbook, a notebook, an ultrabook, a smartphone, a tablet, a personaldigital assistant (PDA), an ultra mobile PC, a mobile phone, a desktopcomputer, a server, a printer, a scanner, a monitor, a set-top box, anentertainment control unit, a digital camera, a portable music player,or a digital video recorder. In further implementations, the computingdevice 1000 may be any other electronic device that processes data.

The above description of illustrated implementations of the invention,including what is described in the Abstract, is not intended to beexhaustive or to limit the invention to the precise forms disclosed.While specific implementations of, and examples for, the invention aredescribed herein for illustrative purposes, various equivalentmodifications are possible within the scope of the invention, as thoseskilled in the relevant art will recognize.

These modifications may be made to the invention in light of the abovedetailed description. The terms used in the following claims should notbe construed to limit the invention to the specific implementationsdisclosed in the specification and the claims. Rather, the scope of theinvention is to be determined entirely by the following claims, whichare to be construed in accordance with established doctrines of claiminterpretation.

What is claimed is:
 1. An apparatus comprising: a semiconductorsubstrate; a device layer disposed on the semiconductor substrate, thedevice layer including one or more transistor devices; and aninterconnect layer disposed on the device layer, the interconnect layercomprising: a fluorocarbon-based dielectric material, and one or moretrench structures or via structures configured to route electricalsignals to or from the one or more transistor devices, wherein amajority portion of the one or more trench structures or via structuresis composed of Co or Ru and the Co or Ru is in direct contact with thefluorocarbon-based dielectric material.
 2. The apparatus of claim 1,wherein the one or more trenches and/or vias of the interconnect layeris directly coupled with contacts of the device layer.
 3. The apparatusof claim 1, wherein the interconnect layer further comprises anisolation film comprising another dielectric material that has achemical composition that is different than the fluorocarbon-baseddielectric material, wherein the isolation film is disposed between thefluorocarbon-based dielectric material and the device layer.
 4. Theapparatus of claim 1, wherein the fluorocarbon-based dielectric materialhas a compositional range from 40% to 60% fluorine (F).
 5. The apparatusof claim 1, wherein the fluorocarbon-based dielectric material has acompositional range from 40% to 60% carbon (C).
 6. The apparatus ofclaim 1, wherein the interconnect layer is a first interconnector layerand the apparatus further comprises: a second interconnect layerdisposed on the first interconnect layer; and an isolation film disposedbetween the first and second interconnect layers.
 7. The apparatus ofclaim 6, wherein the isolation film is composed of silicon nitride (SiN)or silicon carbide (SiC).
 8. A method comprising: forming a device layeron a semiconductor substrate, the device layer including one or moretransistor devices; and forming an interconnect layer on the devicelayer, the interconnect layer comprising a fluorocarbon-based dielectricmaterial, and one or more trench structures or via structures configuredto route electrical signals to or from the one or more transistordevices, wherein a majority portion of the one or more trench structuresor via structures is composed of Co or Ru and the Co or Ru is in directcontact with the fluorocarbon-based dielectric material.
 9. The methodof claim 8, wherein forming the interconnect layer includes: depositingthe fluorocarbon-based dielectric material on the device layer; removingportions of the fluorocarbon-based dielectric material to form openingsin the fluorocarbon-based dielectric material; and forming at least aportion of the one or more trench structures in the openings.
 10. Themethod of claim 9, wherein: depositing the fluorocarbon-based materialis performed using plasma-enhanced chemical vapor deposition (PECVD) ora spin-on process; and removing portions of the fluorocarbon-baseddielectric material is performed using an etch process.
 11. The methodof claim 8, wherein forming the interconnect layer further comprises:performing a chemical mechanical polish (CMP) process on the one or moreinterconnect structures.
 12. The method of claim 8, wherein forming theinterconnect layer further comprises: depositing another dielectricmaterial that has a chemical composition that is different than thefluorocarbon-based dielectric material on the fluorocarbon-baseddielectric material to form an isolation film.
 13. The method of claim8, further comprising: forming one or more die-coupling features on theinterconnect layer; and mounting the semiconductor substrate on acircuit board using the one or more die-coupling features.
 14. Acomputing device comprising: a motherboard; a communication chip mountedon the motherboard; and a processor or a memory device mounted on themotherboard, the communication chip, the processor, or the memory devicecomprising: a semiconductor substrate; a device layer disposed on thesemiconductor substrate, the device layer including one or moretransistor devices; and an interconnect layer disposed on the devicelayer, the interconnect layer comprising a fluorocarbon-based dielectricmaterial, and one or more interconnect structures configured to routeelectrical signals to or from the one or more transistor devices,wherein a majority portion of the one or more interconnect structures iscomposed of Co or Ru and the Co or Ru is in direct contact with thefluorocarbon-based dielectric material
 15. The computing device of claim14, wherein the one or more interconnect structures include trenchstructures or via structures.
 16. The computing device of claim 14,wherein the interconnect layer is directly coupled with the devicelayer.
 17. The computing device of claim 14, wherein the interconnectlayer further comprises an isolation film comprising another dielectricmaterial that has a chemical composition that is different than thefluorocarbon-based dielectric material, wherein the isolation film isdisposed between the fluorocarbon-based dielectric material and thedevice layer.
 18. The computing device of claim 14, wherein thecomputing device is a laptop, a netbook, a notebook, an ultrabook, asmartphone, a tablet, a personal digital assistant (PDA), an ultramobile PC, a mobile phone, a desktop computer, a server, a printer, ascanner, a monitor, a set-top box, an entertainment control unit, adigital camera, a portable music player, or a digital video recorder.